A magnification correction device 1 includes magnification correction
optics 2, a pressure adjustment device 3 and a controller 4. The
magnification correction optics 2 is formed in a shape of a box with a
glass plate 20 and a bottom plate 11 positioned parallel to the glass
plate 20 and a frame 10. The inside of the box is an air room 24
connected to a pressure adjustment device 3 via a connecting pipe 12 so
that the pressure of the inside can be changed. The cylinder 30 is driven
by a motor 35 via a linear movement unit 36 such as a ball screw and the
motor 35 is controlled by a controller 4. The moving distance of cylinder
30, which is equal to the moving distance of the piston, is decided by
the number of the revolutions of the motor 35, and the capacity of the
closed circuit of the pressure adjustment device 3 is also decided.