A plasma potential measuring method is conducted by: providing a measurement space surrounded by a radio-frequency electric field in plasma atmosphere; varying a floating potential at an electrode located in the measurement space by the ponderomotive effect acted only on electrons; and determining as a plasma potential a value of the floating potential at the time when an ion current flown into the electrode begins to lower.

 
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> Eddy-current-damped microelectromechanical switch

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