A method and apparatus for transmitting electrical signals and fluids to
and/or from a microelectronic workpiece. An apparatus in accordance with
one embodiment of the invention includes a shaft rotatable about a shaft
axis and having a first end with a first electrical contact portion
toward the first end, a second end opposite the first end, and an
internal channel along the shaft axis between the first and second ends.
The shaft can further have at least one first hole toward the first end
with the first hole extending radially from the channel to an external
surface of the shaft. The shaft can still further have at least one
second hole toward the second end with the second hole extending from the
channel to the external surface. A housing rotatably receives the shaft
and has an aperture coupleable to a fluid source and/or fluid sink. The
housing further has a fluid passage positioned adjacent to at least one
of the first holes of the shaft and in fluid communication with the
aperture when the shaft rotates relative to the housing. The housing also
has a second electrical contact portion engaged with the first electrical
contact portion to transmit electrical signals between the first and
second electrical contact portions while the shaft rotates relative to
the housing.