A conductive layer for biaxially oriented semiconductor film growth and a
thin film semiconductor structure such as, for example, a photodetector,
a photovoltaic cell, or a light emitting diode (LED) that includes a
crystallographically oriented semiconducting film disposed on the
conductive layer. The thin film semiconductor structure includes: a
substrate; a first electrode deposited on the substrate; and a
semiconducting layer epitaxially deposited on the first electrode. The
first electrode includes a template layer deposited on the substrate and
a buffer layer epitaxially deposited on the template layer. The template
layer includes a first metal nitride that is electrically conductive and
has a rock salt crystal structure, and the buffer layer includes a second
metal nitride that is electrically conductive. The semiconducting layer
is epitaxially deposited on the buffer layer. A method of making such a
thin film semiconductor structure is also described.