A flip-chip type of Group III nitride based compound semiconductor
light-emitting device comprises a transparent conductive film 10 made of
ITO on a p-type contact layer. On the transparent conductive film, an
insulation protection film 20, a reflection film 30 which is made of
silver (Ag) and aluminum (Al) and reflects light to a sapphire substrate
side, and a metal layer 40 made of gold (Au) are deposited in sequence.
Because the insulation protection film 20 exists between the transparent
conductive film 10 and the reflection film 30, metal atoms comprised in
the reflection film 30 can be prevented from diffusing in the transparent
conductive film 10. That enables the transparent conductive film 10 to
maintain high transmissivity. As a result, a light-emitting device having
high external quantum efficienty can be provided.