A flipper for rotating and positioning a photomask in two flip
orientations includes a flip unit rotatably held in a base. The flip unit
includes a flip frame in which clamps are preferably spring loaded guided
such that the clamps are oppositely and laterally displaceable between
engaged positions and parking positions. A stepper motor rotates the flip
unit between two flip orientations and positions the flip unit such that
opposite inspection sides of the work piece are alternately oriented with
respect to a single inspection direction. The flipper may be placed on or
adjacent to a stage system of an inspection device. A robotically
actuated effector may access the flipper for loading and unloading the
work piece. In combination with an effector operating without lift
motion, the clamps may feature wedge lift faces to lift the work piece
off the effector during their actuation into engaged position.