A differential pressure flow sensor system comprises a disposable flow
sensor which has upstream and downstream pressure sensing devices for
detecting a differential pressure in a flow channel. Each sensing device
comprises a diaphragm, a capacitor and an inductor electrically coupled
to the capacitor so as to form an LC tank circuit. The capacitor and/or
inductor can be mechanically coupled to the diaphragm such that a
deflection of the diaphragm in response to fluid pressure applied thereto
causes a change in the resonant frequency of the LC tank. The
differential pressure and flow rate can be determined by detecting
changes in the resonant frequency using interrogation electronics which
can wirelessly interrogate the devices. A calibration capacitor and/or
inductor can be formed on each sensing device and trimmed thereon for
calibration purposes. Such pressure flow systems can be implemented in
medical applications.