The invention provides a method for polishing a substrate comprising a
metal in an oxidized form, the method comprising the steps of: (a)
providing a substrate comprising a metal in an oxidized form, (b)
contacting a portion of the substrate with a chemical-mechanical
polishing system comprising: (i) a polishing component, (ii) a reducing
agent, and (iii) a liquid carrier, and (c) abrading at least a portion of
the metal in an oxidized form to polish the substrate. The reducing agent
can be selected from the group consisting of 3-hydroxy-4-pyrones,
.alpha.-hydroxy-.gamma.-butyrolactones, ascorbic acid, borane,
borohydrides, dialkylamine boranes, formaldehyde, formic acid, hydrogen,
hydroquinones, hydroxylamine, hypophosphorous acid, phosphorous acid, a
metal or metal ions in an oxidation state having a standard redox
potential that is less than the standard redox potential of the metal in
an oxidized form, trihydroxybenzenes, solvated electrons, sulfurous acid,
salts thereof, and mixtures thereof.