A stage apparatus including a stage capable of moving an object, first and
second measurement units adapted to measure a displacement of the stage
in a predetermined direction based on a variation of an optical path
length of measurement light, which are arranged so as to have an overlap
area to simultaneously measure a stage position while the stage is being
moved, a switching unit to switch measurement by the first measurement
unit to measurement by the second measurement unit by delivering a
measurement value from the first measurement unit to the second
measurement unit in the overlap area, and a correction unit, in the stage
position upon switching by the switching unit, to correct a wavelength
variation of the measurement light based on the measurement value
delivered from the first measurement unit to the second measurement unit.