Microelectronic imagers, methods for packaging microelectronic imagers,
and methods for forming electrically conductive through-wafer
interconnects in microelectronic imagers are disclosed herein. In one
embodiment, a microelectronic imaging die can include a microelectronic
substrate, an integrated circuit, and an image sensor electrically
coupled to the integrated circuit. A bond-pad is carried by the substrate
and electrically coupled to the integrated circuit. An electrically
conductive through-wafer interconnect extends through the substrate and
is in contact with the bond-pad. The interconnect can include a passage
extending completely through the substrate and the bond-pad, a dielectric
liner deposited into the passage and in contact with the substrate, first
and second conductive layers deposited onto at least a portion of the
dielectric liner, and a conductive fill material deposited into the
passage over at least a portion of the second conductive layer and
electrically coupled to the bond-pad.