An automated nanomanipulation system is provided for manufacturing a
nanoscale structure. The system includes: a design model for the
nanoscale structure; image data of a sample surface upon which the
nanoscale structure is to be manufactured; a movable member configured to
perform a nanomanipulation operation on the sample surface; and a path
planning subsystem adapted to receive the design model and the image
data. The path planning subsystem generates path data indicative of a
path for traversing the movable member along the sample surface such that
the movable member manipulates one or more randomly distributed
nanoobjects in accordance with the design model.