A nonvolatile semiconductor memory includes a first and a second active
area configured to extend in the column direction in parallel; an element
isolating region configured to electrically separate the first and the
second active area; a plurality of word lines configured to extend in the
row direction and be constituted by respective main parts and respective
ends; and a plurality of memory cell transistors configured to be
disposed on intersections between the respective main parts of the
plurality of word lines and the second active area. Each memory cell
transistor comprises a gate insulating film, a floating gate electrode,
an inter-gate insulating film, and a control gate electrode, constituting
a memory cell array; a short-circuit region configured to electrically
short circuit the ends of the plurality of word lines; and a trench
configured to separate the ends from the main parts of the plurality of
word lines.