A broadband ellipsometer/polarimeter system for analyzing a sample
includes an illumination source emitting a polychromatic light beam, a
polarization state generator (PSG) including a fixed linear polarizer and
a substantially achromatic retarder mounted on a rotating holder, a
sample holder, a polarization state analyser (PSA) including a fixed
linear polarizer and a substantially achromatic retarder mounted on a
rotating holder, a primary detection system measuring the intensities at
each wavelength of the light beam transmitted through the PSA, optics to
collimate the beam into the PSG and into the PSA and to focus the beam
into the sample surface and the detector. The linear polarizer and
achromatic retarder in the PSA are identical to those of the PSG but
mounted in a reverse order.