The field of the invention is that of microsystems of the
electrostatically actuated microswitch type that are used in electronics
to carry out switching functions, especially in the microwave field for
mobile telephony and radars. The object of the invention is to improve
the performance of the switch by reducing the response time of the device
and by increasing the radiofrequency or microwave power supported, while
still maintaining low switching voltages. This improved performance is
obtained by using thick membranes and by placing a material of high
relative permittivity between said membrane and the associated electrode.
The switch is obtained by a novel production process, the membrane being
produced on an independent substrate and then joined to the base
substrate of the switch. Examples of processes for producing devices
according to the invention with the materials that can be used, the
possible geometries and the various production steps are given.