A method for reticle design correction and electrical parameter extraction
of a multi-cell reticle design. The method including: selecting a subset
of cell designs of a multi-cell reticle design, each cell design of the
subset of cell designs having a corresponding shape to process, for each
cell design of the subset of cell designs determining a respective cell
design location of the corresponding shape; determining a common shapes
processing rule for all corresponding shapes of each cell design based on
the respective cell design locations of each of the corresponding shapes;
and performing shapes processing of the corresponding shape only of a
single cell design of the subset of cell designs to generate resulting
data for the subset of cell designs. Also a computer usable medium
including computer readable program code having an algorithm adapted to
implement the method for reticle design correction and electrical
extraction.