In an anti-reflective film including alternating layers of high refractive-index layers and low refractive-index layers, by designing such that a designed central wavelength .lamda..sub.0 is within a wavelength range of 141 nm to 189 nm, and that when the first to eighth layers as counted from a substrate have optical film thicknesses d1 to d8 respectively, the equations of: 0.45.lamda..sub.0.ltoreq.d1.ltoreq.0.65.lamda..sub.0; 0.05.lamda..sub.0.ltoreq.d2.ltoreq.0.20.lamda..sub.0; 0.29.lamda..sub.0.ltoreq.d3.ltoreq.0.49.lamda..sub.0; 0.01.lamda..sub.0.ltoreq.d4.ltoreq.0.15.lamda..sub.0; 0.05.lamda..sub.0.ltoreq.d5.ltoreq.0.20.lamda..sub.0; 0.23.lamda..sub.0.ltoreq.d6.ltoreq.0.28.lamda..sub.0; 0.23.lamda..sub.0.ltoreq.d7.ltoreq.0.28.lamda..sub.0; and 0.23.lamda..sub.0.ltoreq.d8.ltoreq.0.28.lamda..sub.0 are satisfied, the anti-reflective film can be formed so as to have a low reflectance for a light incident at such a large angle as 30 degrees or more, without increasing the whole thickness of the film.