The memory cell array comprises a plurality of parallel fins provided as
bitlines arranged at a distance of down to about 40 nm from one another
and having a lateral dimension of less than about 30 nm, subdivided into
pairs of adjacent first and second fins. A charge-trapping memory layer
sequence is arranged on the fins. Wordlines are arranged across the fins,
and source/drain regions are located in the fins between the wordlines
and at the ends of the fins. There are preferably self-aligned contact
areas of the source/drain regions at the ends of the fins, each contact
area being common to the fins of one of said pairs. Select transistors
and select lines are provided for the first and second fins individually
to enable a separate addressing of the memory cells.