A gas turbo pump assembly for connection to a port of a vacuum chamber and
having high throughput with low vibration. The assembly comprises a turbo
pump and a vibration damper. The pump has a pump body with an external
surface and a center axis defining a first axial end and a second axial
end of the pump. The pump also has a pump inlet port, the inlet port
being coupled to the vacuum chamber port disposed at the first axial end
of the pump, and an exit port disposed proximate the second axial end of
the pump. The assembly vibration damper is structured to enclose a
substantial portion of the pump in a nested arrangement.