The present invention provides a salt of the formula (I): ##STR00001## wherein ring X represents monocyclic or bicyclic hydrocarbon group having 3 to 30 carbon atoms, and one or more hydrogen atom in the ring X is optionally substituted with alkyl group having 1 to 6 carbon atoms, alkenyl group having 2 to 6 carbon atoms, alkoxy group having 2 to 6 carbon atoms or perfluoroalkyl group having 1 to 4 carbon atoms; Q.sup.1 and Q.sup.2 each independently represent fluorine atom or perfluoroalkyl group having 1 to 6 carbon atoms; A.sup.+ represents organic counter ion; and n shows an integer of 1 to 12.The present invention also provides a chemically amplified resist composition comprising the salt of the formula (I).