The present invention provides an aqueous slurry composition that
comprises cerium oxide and/or cerium oxide-containing mixed rare earth
oxide abrasive particles, a polyacrylate, and an agent that retards hard
settling. The agent that retards hard settling is preferably a
polysaccharide such as xanthan gum, microcrystalline cellulose and/or
sodium alginate, the latter of which may be treated with a divalent metal
salt such as calcium carbonate. The slurry composition according to the
invention can be used to polish glass and glass ceramics at a high
removal rate, but does not hard settle upon extended static conditions
and can be easily resuspended. The present invention also provides a
method of polishing a glass or glass ceramic substrate using the slurry
composition.