A laser produced plasma device comprises a shutter assembly for mitigating
the contaminating effects of debris generated by the plasma. In one
embodiment, the shutter assembly includes a rotatable shutter having at
least one aperture that provides a line-of-sight between a radiation
source and an exit of the device during a first period of rotation of the
shutter, and obstructs the line-of-sight between the radiation source and
the exit during a second period of rotation. The shutter assembly in this
embodiment also includes a motor configured to rotate the shutter to
permit passage of the X-rays through the at least one aperture during the
first period of rotation, and to thereafter rotate the shutter to
obstruct passage of the debris through the at least one aperture during
the second period of rotation.