A compensation signal, which derives the mechanical stress, which acts on
an integrated semiconductor circuit, from two partial compensation
signals, which are generated by semiconductor elements with different
stress characteristics, can be determined in more detail when the
temperature dependence of a ratio of the partial compensation signals is
also considered, wherein particularly a deviation of the ratio of the
partial compensation signal to an ideal ratio is considered. Thereby, the
rise in accuracy of the stress determination results from determining a
deviation of the partial compensation signals, on which the stress
determination is based, from a nominal behavior in a stress-free state,
so that the deviation of the nominal behavior, which can be based, for
example, on a variation of the process parameters in a production process
of a semiconductor circuit, can also be considered, in addition to the
known temperature behavior.