A system for managing production information includes a defect information
database, a defect information collection unit, and a manufacturing
apparatus information managing unit. The defect information database
stores defect information including a coordinate value of a defect
portion and a defect feature amount which are detected by inspecting a
specimen processed in a device manufacturing line by using an optical
inspection apparatus having an ultraviolet light source. The defect
information collection unit at least one of collates and retrieves defect
information from the defect information database and judges a fatality of
a defect. The manufacturing apparatus information managing unit which
processes information stored in the defect information collection unit
and stores information on transition of yield and maintenance condition
of a manufacturing apparatus in the device manufacturing line.