A highly sensitive and ultra-high density array of electromechanical
nanowires is fabricated. Nanowires are extremely sensitive to the strain
induced by the attachment of biological and chemical species. Real-time
detection is realized through piezoresistive transduction from the
specially designed materials that form the nanowires. These specially
designed materials include doped silicon or germanium, doped III-V
semiconductors such as GaAs, GaN and InAs systems, and ultra-thin metal
films.