A point diffraction interferometer measures optical performance of a
target optical system based on a light intensity distribution of an
interference fringe through an interference between a wave front that
passes the target optical system and a reference wave front generated
from a pinhole, wherein the pinhole satisfies
1.05.ltoreq.ellipticity.ltoreq.1.16, where the ellipticity is defined as
a diameter of a pinhole in a direction perpendicular to a linear
polarization direction of light incident upon the pinhole, divided by a
diameter of the pinhole in the linear polarization direction.