To facilitate high frequency operation, transmission lines for high-speed
interconnect applications in CMOS technologies are loaded with patterned
permalloy or other ferromagnetic material films. Patterning the permalloy
films as a plurality of segments results in control of the domain
structures in the permalloy segments such that ferromagnetic resonance
(FMR) effects are eliminated and eddy-current effects are reduced,
thereby allowing operation of the transmission lines at frequencies of 20
GHz or higher. In addition, the patterned permalloy reduces the magnetic
field coupling between two adjacent transmission lines. A novel
ferromagnetic thin film characterization method is also employed to
measure the microwave permeability of the patterned permalloy films and
verify their high frequency operational characteristics.