A method for improving yield of a process for fabricating a read-only memory (ROM) includes evaluating a yield of a ROM fabrication process associated with a first ROM design. At least two candidate ROM design modifications are identified. At least one of the candidate ROM design modifications comprises inversion of bit values of data to be stored in the ROM. A plurality of criteria are applied, including at least an amount of yield improvement and a difficulty of implementation associated with each candidate ROM design modification. One of the candidate ROM design modifications is selected based on the application of the criteria. A modified ROM fabrication process is performed to fabricate a ROM according to the selected ROM design modification.