Disclosed herein is a plate type capacitive sensor for five-dimensional
displacement measurement that is capable of simultaneously measuring
five-dimensional movement of an object, which includes the horizontal
movement, the vertical movement, and the tilt of the object. The plate
type capacitive sensor for five-dimensional displacement measurement
comprises a plate located adjacent to an object to be measured, and a
ground part, a first guard part, a displacement measuring sensor, and a
second guard part, which are stacked on the plate in consecutive order.
The plate may be made by machining or made of a printed circuit board
(PCB).