It is an object of the present invention to provide a material for an
antireflective film that has high etching selectivity with respect to the
resist, that is, that has a faster etching speed than the resist, a
pattern formation method for forming an antireflective film layer on a
substrate using this antireflective film material, and a pattern
formation method using this antireflective film as a hard mask for
substrate processing. The present invention provides a silicone resin for
preventing reflection comprising an organic group comprising a
carbon-oxygen single bond and/or a carbon-oxygen double bond; a
light-absorbing group; and a silicon atom whose terminal end or ends are
Si--OH and/or Si--OR. It also provides an antireflective film material
comprising this silicone resin (A) for preventing reflection film, an
organic solvent (B) and an acid generator (C).