A nano-colonnade structure-and methods of fabrication and interconnection
thereof utilize a nanowire column grown nearly vertically from a (111)
horizontal surface of a semiconductor layer to another horizontal surface
of another layer to connect the layers. The nano-colonnade structure
includes a first layer having the (111) horizontal surface; a second
layer having the other horizontal surface; an insulator support between
the first layer and the second layer that separates the first layer from
the second layer. A portion of the second layer overhangs the insulator
support, such that the horizontal surface of the overhanging portion is
spaced from and faces the (111) horizontal surface of the first layer.
The structure further includes a nanowire column extending nearly
vertically from the (111) horizontal surface to the facing horizontal
surface, such that the nanowire column connects the first layer to the
second layer.