Methods are disclosed generally directed to design and synthesis of
quantum dot nanoparticles having improved uniformity and size. In a
preferred embodiment, a release layer is deposited on a semiconductor
wafer. A heterostructure is grown on the release layer using epitaxial
deposition techniques. The heterostructure has at least one layer of
quantum dot material, and optionally, one or more layers of reflective
Bragg reflectors. A mask is deposited over a top layer and reactive
ion-beam etching applied to define a plurality of heterostructures. The
release layer can be dissolved releasing the heterostructures from the
wafer. Some exemplary applications of these methods include formation of
fluorophore materials and high efficiency photon emitters, such as
quantum dot VCSEL devices. Other applications include fabrication of
other optoelectronic devices, such as photodetectors.