A surface inspection apparatus includes: a light source unit that emits a
divergent light flux of predetermined linearly polarized light to be used
to illuminate a test substrate; a first optical member that allows the
divergent light flux of the predetermined linearly polarized light to
enter therein with a predetermined angle of incidence and then guides a
light flux to the test substrate; a second optical member that allows a
light flux from the test substrate to enter therein, emits a convergent
light flux thereof with a predetermined angle of emergence and forms an
image at a specific surface; an extraction unit that extracts linearly
polarized light in the convergent light flux from the second optical
member, which is perpendicular to the predetermined linearly polarized
light; a light-receiving unit that receives an image of the test
substrate formed via the second optical member and the extraction unit;
and at least one polarization correcting member disposed within a light
path extending between the light source unit and the light-receiving
unit, which corrects a disruption of a polarization plane attributable to
the first optical member and the second optical member.