A simple and convenient sensor and measuring apparatus utilizing the
optical interference effect of an optical thin film capable of measuring
the binding between biochemical substances at a high throughput and
having alkali resistance. An optical thin film of silicon nitride is
disposed on the first surface and the rear surface of a silicon
substrate, and the thickness of the silicon nitride film is modified in a
direction parallel to the film. A portion of the thin film with increased
thickness is used as a sensor upon which a probe is disposed, and over
which a sample-containing solution is caused to flow. The binding between
the probe and biochemical sample is detected based upon the change of the
intensity of reflected light.