The present invention provides for a composition and a process for forming the composition. The composition comprises an organic polymer and 0.5-40% by weight of the composition of a siloxane, the organic polymer having a fluorinated backbone and 3-20 mol-% of pendant groups represented by the formula (I): --O.sub.p--[CF(R.sub.f.sup.1)CF--O.sub.m].sub.n--CF.sub.2CF.sub.2SO.sub.3- X; wherein R.sub.f is F or .sub.2CF.sub.2SO.sub.3X; wherein R.sub.f is F or a perfluoroalkyl radical having 1-10 carbon atoms either unsubstituted or substituted by one or more ether oxygen atoms, m=0 or 1, n=0) to 3, p=0 or 1, and X is H or an alkali metal; the siloxane comprising two or more groups which need not be the same represented by the formula (II): --O.sub.aSi(OH).sub.b-aR.sup.1.sub.3-bR.sup.2R.sub.f.sup.2SO.sub.3; wherein a=1; 1 to b, b=1 to R.sup.1 is a non-hydrolyzable group independently selected from the group consisting of alkyl, cycloalkyl, aryl and aralkyl, X is is an alkali metal or hydrogen, R.sup.2 is a bidentate alkylene radical either unsubstituted or substituted by at least one ether oxygen atom with the proviso that R.sup.2 has at least two carbon atoms linearly disposed between Si and R.sub.f.sup.2, and R.sub.f.sup.2 is a perfluoroalkylene ether radical either unsubstituted or substituted by at least one ether oxygen atom.

 
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> Fluorinated polymers having polycyclic groups with fused 4-membered carbocyclic rings, useful as photoresists, and processes for microlithography

~ 00398