A structure for a gallium-nitride (GaN) based ultraviolet photo detector
is provided. The structure contains an n-type contact layer, a light
absorption layer, a light penetration layer, and a p-type contact layer,
sequentially stacked on a substrate from bottom to top in this order. The
layers are all made of aluminum-gallium-indium-nitride (AlGaInN) compound
semiconductors. By varying the composition of aluminum, gallium, and
indium, the layers, on one hand, can achieve the desired band gaps so
that the photo detector is highly responsive to ultraviolet lights having
specific wavelengths. On the other hand, the layers have compatible
lattice constants so that problems associated with excessive stress are
avoided and high-quality epitaxial structure is obtained. The structure
further contains a positive electrode, a light penetration contact layer,
and an anti-reflective coating layer on top of the p-type contact layer,
and a negative electrode on the n-type contact layer.