A wide-area electrostatically-actuated shutter is provided that includes a
thin, flexible, diaphragm that is placed between two rigid electrode
structures. In one embodiment of the invention, the diaphragm has a set
of openings in it. These openings overlap with corresponding openings in
one of the rigid electrodes such that when the diaphragm is contiguous to
that electrode, the openings provide apertures through which vaporous
fuel can flow. The opposite electrode does not have overlapping openings,
thus it forms a seal that prevents gas or vapor from passing through it
when the diaphragm is in contact with the opposite electrode. The shutter
is actuated electrostatically by an associated driver that applies a
voltage to the diaphragm such that when the high voltage is applied to
the diaphragm, the diaphragm is attracted to the fixed electrode that is
tied to ground. Alternatively, when is desired to place the shutter in
the opposite position, the diaphragm is placed at ground, which, in turn,
pulls it towards the fixed electrode that is at a high voltage, to adjust
the shutter. The shutter can be rapidly opened and closed at a high
frequency in a PWM mode or a PFM mode.