A sintered article is fabricated which contains one or more of indium
oxide, zinc oxide, and tin oxide as a component thereof and contains any
one or more types of metal out of hafnium oxide, tantalum oxide,
lanthanide oxide, and bismuth oxide. A backing plate is attached to this
sintered article to constitute a sputtering target. This sputtering
target is used to fabricate a conductive film on a predetermined
substrate by sputtering. This conductive film achieves a large work
function while maintaining as much transparency as heretofore. This
conductive film can be used to achieve an EL device or the like of
improved hole injection efficiency.