A semiconductor waveguide includes a section containing free charge, either electrons or holes, which can be steered into or removed from the path of the beam under the control of electrical signals. The mobile charges come from a potential well which may be either filled or depleted under electrical control. When the well is filled, the charges speed the beam propagation, introducing a phase change. When the well is emptied the beam propagates with extra delay. The phase shifter allows very high speed modulation of the beam using low voltage and low power electronics. The device can be created using standard silicon processing techniques, and integrated with other optical components such as splitters and combiners to create amplitude modulators, attenuators and other optical devices.