A plasma treatment apparatus and a method for plasma treatment are
provided that made possible to control accurately a distance between
plasma and an object to be treated (hereinafter referred to as an
object), and that facilitated a transportation of a substrate that a
width is thin and grown in size. The plasma treatment apparatus of the
present invention is provided with a gas supply means for introducing a
processing gas into a place between a first electrode and a second
electrode under an atmospheric pressure or around atmospheric pressure; a
plasma generation means for generating plasma by applying a high
frequency voltage to the first electrode or the second electrode under
the condition that the processing gas is introduced; and, a transport
means for transporting the object by floating the object by blowing the
processing gas or a transporting gas to the object. An etching treatment;
an ashing treatment; a thin film formation; or a cleaning treatment of
components using the first electrode and the second electrode is carried
out by moving a relative position between the first electrode and the
second electrode, and the object.