A pellicle is provided that includes an aluminum alloy pellicle frame
having a polymer coating on the surface and a pellicle film stretched
over the pellicle frame. There is also provided a process for producing
the pellicle in which the polymer coating is an electrodeposition-coated
film, the process including a step of roughening the surface of the
aluminum alloy pellicle frame by sandblasting, a step of etching the
surface of the pellicle frame with an alkali solution, a step of
electrodeposition coating the pellicle frame, and a step of stretching
the pellicle film over the pellicle frame.