One embodiment of the present invention provides a system that associates
an error in a layout with a cell. During operation, the system receives a
layout which is designed to create a target feature with an intended
shape. Next, the system determines an error in a critical dimension of
the target feature. The system then identifies a cell in the layout based
on the error's location in the layout, thereby associating the error with
the cell. Note that associating errors with cells allows the errors to be
summarized based on the associated cells, which can reduce the amount of
time required to identify and fix the errors.