A method of manufacturing a chemical-mechanical polishing (CMP) pad
comprises the steps of (a) forming a layer of a polymer resin liquid
solution (i.e., a polymer resin dissolved in a solvent); (b) inducing a
phase separation in the layer of polymer solution to produce an
interpenetrating polymeric network comprising a continuous polymer-rich
phase interspersed with a continuous polymer-depleted phase in which the
polymer-depleted phase constitutes about 20 to about 90 percent of the
combined volume of the phases; (c) solidifying the continuous
polymer-rich phase to form a porous polymer sheet; (d) removing at least
a portion of the polymer-depleted phase from the porous polymer sheet;
and (e) forming a CMP pad therefrom. The method provides for microporous
CMP pads having a porosity and pore size that can be readily controlled
by selecting the concentration polymer resin in the polymer solution,
selecting the solvent based on the solubility parameters of the polymer
in the solvent polarity of solvent, selecting the conditions for phase
separation, and the like.