A method for performing a liftoff operation involves printing a liftoff
pattern using low-resolution patterning techniques to form fine feature
patterns. The resulting feature size is defined by the spacing between
printed patterns rather than the printed pattern size. By controlling the
cross-sectional profile of the printed liftoff pattern, mask structures
may be formed from the liftoff operation having beneficial etch-mask
aperture profiles. For example, a multi-layer printed liftoff pattern can
be used to create converging aperture profiles in a patterned layer. The
patterned layer can then be used as an etch mask, where the converging
aperture profiles result in desirable diverging etched features.