There is provided a semiconductor storage device comprising a
ferroelectric capacitor superior in barrier capability against
penetration of hydrogen from all directions including a transverse
direction. The device comprises a transistor formed on a semiconductor
substrate, the ferroelectric capacitor formed above the transistor and
including a lower electrode, a ferroelectric film, and an upper
electrode, a first hydrogen barrier film which continuously surrounds
side portions of a ferroelectric capacitor cell array constituted of a
plurality of ferroelectric capacitors, and a second hydrogen barrier film
which is formed above the ferroelectric capacitor cell array and which is
brought into contact with the first hydrogen barrier film in the whole
periphery.