A Hall-current ion source for generation of low and high energy ion beams
with selection of magnetic fields and emission currents, where there are
utilized low magnetic fields and high emission currents that are higher
than discharge currents for low energy ion beams, 15-100 eV; high
magnetic fields and emission currents that are equal to discharge
currents are utilized for discharge voltages providing ion beam energies
of 100-500 eV. Other measures are utilized for protection of a gas
distribution area and a magnet from pinching by an ion beam penetration
through a reflector by a buffer chamber providing better gas distribution
in anode area, a protective ring in a center part of a reflector, and
others.