The invention provides a method of performing process window compliant
corrections of a design layout. The invention includes an operator
performing the following steps: (1) simulating Develop Inspect Critical
Dimension (DI CD) at best exposure conditions using the provided original
layout pattern; (2) simulating DI CD at predefined boundary exposure
conditions using the provided original layout pattern; (3) if the DI CD
from step (1) meets the target DI CD definition, and the DI CD from step
(2) meets process window specifications, convergence takes place; and (4)
modifying the layout pattern and repeating steps (2) through (3) until DI
CD from step (2) reaches the specification limit if any portion of step
(3) is not achieved.