A pneumatic cylinder has a shaft member having a piston and a piston rod
combined with each other in an axial direction, a cylinder body
supporting the shaft member with the piston rod protruding outwardly
therefrom so as to freely reciprocate linearly, and porous air bearings
and which are incorporated into the cylinder body and slidably support
the piston and the piston rod. Materials whose thermal expansion
coefficients are approximately equivalent are used for the shaft member,
the cylinder body, and the air bearings. While gaps between the shaft
member and the air bearings are held constant, and the functions of air
layers formed in the gap, namely, a sliding function and a sealing
function can be maintained stably regardless of temperature change.