The invention includes methods in which at least two different precursors
are flowed into a reaction chamber at different and substantially
non-overlapping times relative to one another to form a material over at
least a portion of a substrate, and in which at least one of the
precursors is asymmetric with respect to a physical property. A field
influencing the asymmetric physical property is oriented within the
reaction chamber, and is utilized to affect alignment of the precursor
having the asymmetric property as the material is formed. The asymmetric
physical property can, for example, be an anisotropic charge distribution
associated with the precursor, and in such aspect, the field utilized to
influence the asymmetric physical property can be an electric field
provided within the reaction chamber and/or a magnetic field provided
within the reaction chamber. The methodology of the present invention can
be utilized in atomic layer deposition processes.