A nano-optic device comprises a plurality of subwavelength apertures in a metal film or between metal islands. The device is adapted to shape a radiation beam transmitted there through. For example, beam shaping includes at least one of beam focusing, beam bending and beam collimating.

 
Web www.patentalert.com

< System and method for sensitive photon detection

> Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system

~ 00402