A display device is provided in which contact holes, each having a
sidewall with an ideal tapered shape, are formed in a structure in which
a silicon oxide film, a silicon nitride film and a silicon oxide film are
stacked in the named order. The display device includes a first silicon
oxide film, a silicon nitride film stacked on the first silicon oxide
film, a second silicon oxide film stacked on the silicon nitride film,
and a contact hole which extends through at least these three layers. In
the display device, letting d2 and d3 denote, respectively, a film
thickness of the silicon nitride film and a film thickness of the second
silicon oxide film, these films are stacked to satisfy the relationship
d2